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    Improvement of Thickness Uniformity of Bulk Silicon Wafer by Numerically Controlled Local Wet Etching

    New search for: Yamamura, K.
    New search for: Mitani, T.
    New search for: Ueda, K.
    New search for: Nagano, M.
    New search for: Zettsu, N.
    New search for: Rui, F.
    New search for: Lihong, Q.
    New search for: Huawei, C.
    New search for: Akio, O.
    New search for: Hiroshi, U.
    New search for: Katsuhiko, S.

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    Improvement of Thickness Uniformity of Bulk Silicon Wafer by Numerically Controlled Local Wet Etching

    New search for: Yamamura, K.
    New search for: Mitani, T.
    New search for: Ueda, K.
    New search for: Nagano, M.
    New search for: Zettsu, N.
    New search for: Rui, F.
    New search for: Lihong, Q.
    New search for: Huawei, C.
    New search for: Akio, O.
    New search for: Hiroshi, U.
    New search for: Katsuhiko, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Improvement of Thickness Uniformity of Bulk Silicon Wafer by Numerically Controlled Local Wet Etching

    New search for: Yamamura, K.
    New search for: Mitani, T.
    New search for: Ueda, K.
    New search for: Nagano, M.
    New search for: Zettsu, N.
    New search for: Rui, F.
    New search for: Lihong, Q.
    New search for: Huawei, C.
    New search for: Akio, O.
    New search for: Hiroshi, U.
    New search for: Katsuhiko, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Title:

    Improvement of Thickness Uniformity of Bulk Silicon Wafer by Numerically Controlled Local Wet Etching

    Contributors:

    Yamamura, K. (author) / Mitani, T. (author) / Ueda, K. (author) / Nagano, M. (author) / Zettsu, N. (author) / Rui, F. / Lihong, Q. / Huawei, C. / Akio, O. / Hiroshi, U.

    Published in:

    Progress of Machining Technology ; 372-375

    KEY ENGINEERING MATERIALS ; 407/408

    Publication date:

    2009-01-01

    Size:

    4 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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