A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Surface Polishing of 2-Inch 4H-SiC Wafer Using Fe Abrasive Particles
Surface Polishing of 2-Inch 4H-SiC Wafer Using Fe Abrasive Particles
Surface Polishing of 2-Inch 4H-SiC Wafer Using Fe Abrasive Particles
Kubota, A. (author) / Ichimori, Y. (author) / Touge, M. (author)
KEY ENGINEERING MATERIALS ; 516 ; 487-491
2012-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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