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Ion beam sputter deposition of epitaxial Ag films on native oxide covered Si(100) substrates

Khare, C. / Gerlach, J. W. / Patzig, C. / Rauschenbach, B.

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Ion beam sputter deposition of epitaxial Ag films on native oxide covered Si(100) substrates

Khare, C. / Gerlach, J. W. / Patzig, C. / Rauschenbach, B.

Ion beam sputter deposition of epitaxial Ag films on native oxide covered Si(100) substrates

Khare, C. / Gerlach, J. W. / Patzig, C. / Rauschenbach, B.

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Document information

Title:

Ion beam sputter deposition of epitaxial Ag films on native oxide covered Si(100) substrates

Contributors:

Khare, C. (author) / Gerlach, J. W. (author) / Patzig, C. (author) / Rauschenbach, B. (author)

Published in:

APPLIED SURFACE SCIENCE ; 258 ; 9617-9622

Publication date:

2012-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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