Low-Energy-Ion-Assisted Reactive Sputter Deposition of Epitaxial AlN Thin Films on 6H-SiC: Fid-Bau Portal

Low-Energy-Ion-Assisted Reactive Sputter Deposition of Epitaxial AlN Thin Films on 6H-SiC

Tungasmita, S. / Persson, P. O. A. / Jarrendahl, K. / Hultman, L. / Birch, J.

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Low-Energy-Ion-Assisted Reactive Sputter Deposition of Epitaxial AlN Thin Films on 6H-SiC

Tungasmita, S. / Persson, P. O. A. / Jarrendahl, K. / Hultman, L. / Birch, J.

Low-Energy-Ion-Assisted Reactive Sputter Deposition of Epitaxial AlN Thin Films on 6H-SiC

Tungasmita, S. / Persson, P. O. A. / Jarrendahl, K. / Hultman, L. / Birch, J.

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Document information

Title:

Low-Energy-Ion-Assisted Reactive Sputter Deposition of Epitaxial AlN Thin Films on 6H-SiC

Contributors:

Tungasmita, S. (author) / Persson, P. O. A. (author) / Jarrendahl, K. (author) / Hultman, L. (author) / Birch, J. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 1519-1522

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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