c-axis orientation and piezoelectric coefficients of AlN thin films sputter-deposited on titanium bottom electrodes: Fid-Bau Portal

c-axis orientation and piezoelectric coefficients of AlN thin films sputter-deposited on titanium bottom electrodes

Ababneh, A. / Alsumady, M. / Seidel, H. / Manzaneque, T. / Hernando-Garcia, J. / Sanchez-Rojas, J. L. / Bittner, A. / Schmid, U.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

c-axis orientation and piezoelectric coefficients of AlN thin films sputter-deposited on titanium bottom electrodes

Ababneh, A. / Alsumady, M. / Seidel, H. / Manzaneque, T. / Hernando-Garcia, J. / Sanchez-Rojas, J. L. / Bittner, A. / Schmid, U.

c-axis orientation and piezoelectric coefficients of AlN thin films sputter-deposited on titanium bottom electrodes

Ababneh, A. / Alsumady, M. / Seidel, H. / Manzaneque, T. / Hernando-Garcia, J. / Sanchez-Rojas, J. L. / Bittner, A. / Schmid, U.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

c-axis orientation and piezoelectric coefficients of AlN thin films sputter-deposited on titanium bottom electrodes

Contributors:

Ababneh, A. (author) / Alsumady, M. (author) / Seidel, H. (author) / Manzaneque, T. (author) / Hernando-Garcia, J. (author) / Sanchez-Rojas, J. L. (author) / Bittner, A. (author) / Schmid, U. (author)

Published in:

APPLIED SURFACE SCIENCE ; 259 ; 59-65

Publication date:

2012-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Trujillo, N. A. / Oldinski, R. A. / Ma, H. et al. | British Library Online Contents | 2012

Sputter deposited chromium nitride thin electrodes for supercapacitor applications

Arif, Mohd / Sanger, Amit / Singh, Arun | British Library Online Contents | 2018

Titanium oxynitride thin films sputter deposited by the reactive gas pulsing process

Chappe, J. M. / Martin, N. / Lintymer, J. et al. | British Library Online Contents | 2007

Nitrogen pulsing to modify the properties of titanium nitride thin films sputter deposited

Martin, N. / Lintymer, J. / Gavoille, J. et al. | British Library Online Contents | 2002

Direct current magnetron sputter-deposited ZnO thin films

Hoon, J. W. / Chan, K. Y. / Krishnasamy, J. et al. | British Library Online Contents | 2011