Effect of propane/silane ratio on the growth of 3C-SiC thin films on Si(100) substrates by APCVD: Fid-Bau Portal

Effect of propane/silane ratio on the growth of 3C-SiC thin films on Si(100) substrates by APCVD

Shi, B. / Liu, X. C. / Zhu, M. X. / Yang, J. H. / Shi, E. W.

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Effect of propane/silane ratio on the growth of 3C-SiC thin films on Si(100) substrates by APCVD

Shi, B. / Liu, X. C. / Zhu, M. X. / Yang, J. H. / Shi, E. W.

Effect of propane/silane ratio on the growth of 3C-SiC thin films on Si(100) substrates by APCVD

Shi, B. / Liu, X. C. / Zhu, M. X. / Yang, J. H. / Shi, E. W.

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Title:

Effect of propane/silane ratio on the growth of 3C-SiC thin films on Si(100) substrates by APCVD

Contributors:

Shi, B. (author) / Liu, X. C. (author) / Zhu, M. X. (author) / Yang, J. H. (author) / Shi, E. W. (author)

Published in:

APPLIED SURFACE SCIENCE ; 259 ; 685-690

Publication date:

2012-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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