The Microstructure and Surface Morphology of Thin 3C-SiC Films Grown on (100) Si Substrates Using an APCVD-Based Carbonization Process: Fid-Bau Portal

The Microstructure and Surface Morphology of Thin 3C-SiC Films Grown on (100) Si Substrates Using an APCVD-Based Carbonization Process

Wu, C. H. / Chung, J. / Hong, M. H. / Zorman, C. A. / Pirouz, P. / Mehregany, M.

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The Microstructure and Surface Morphology of Thin 3C-SiC Films Grown on (100) Si Substrates Using an APCVD-Based Carbonization Process

Wu, C. H. / Chung, J. / Hong, M. H. / Zorman, C. A. / Pirouz, P. / Mehregany, M.

The Microstructure and Surface Morphology of Thin 3C-SiC Films Grown on (100) Si Substrates Using an APCVD-Based Carbonization Process

Wu, C. H. / Chung, J. / Hong, M. H. / Zorman, C. A. / Pirouz, P. / Mehregany, M.

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Title:

The Microstructure and Surface Morphology of Thin 3C-SiC Films Grown on (100) Si Substrates Using an APCVD-Based Carbonization Process

Contributors:

Wu, C. H. (author) / Chung, J. (author) / Hong, M. H. (author) / Zorman, C. A. (author) / Pirouz, P. (author) / Mehregany, M. (author)

Published in:

MATERIALS SCIENCE FORUM ; 353/356 ; 167-170

Publication date:

2001-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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