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Effects of hydrogen atmosphere on pulsed-DC sputtered nanocrystalline Si:H films
Effects of hydrogen atmosphere on pulsed-DC sputtered nanocrystalline Si:H films
Effects of hydrogen atmosphere on pulsed-DC sputtered nanocrystalline Si:H films
Cherng, J.S. (author) / Chang, S.H. (author) / Hong, S.H. (author) / Boo, J.-H. / Ahn, H.
2012-01-01
4 pages
Article (Journal)
English
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