Rapid Planarization Method by Ultraviolet Light Irradiation for Gallium Nitride Using Platinum Catalyst: Fid-Bau Portal

Rapid Planarization Method by Ultraviolet Light Irradiation for Gallium Nitride Using Platinum Catalyst

Asano, H. / Sadakuni, S. / Yagi, K. / Sano, Y. / Matsuyama, S. / Okamoto, T. / Tachibana, K. / Yamauchi, K.

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Rapid Planarization Method by Ultraviolet Light Irradiation for Gallium Nitride Using Platinum Catalyst

Asano, H. / Sadakuni, S. / Yagi, K. / Sano, Y. / Matsuyama, S. / Okamoto, T. / Tachibana, K. / Yamauchi, K.

Rapid Planarization Method by Ultraviolet Light Irradiation for Gallium Nitride Using Platinum Catalyst

Asano, H. / Sadakuni, S. / Yagi, K. / Sano, Y. / Matsuyama, S. / Okamoto, T. / Tachibana, K. / Yamauchi, K.

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Title:

Rapid Planarization Method by Ultraviolet Light Irradiation for Gallium Nitride Using Platinum Catalyst

Contributors:

Asano, H. (author) / Sadakuni, S. (author) / Yagi, K. (author) / Sano, Y. (author) / Matsuyama, S. (author) / Okamoto, T. (author) / Tachibana, K. (author) / Yamauchi, K. (author)

Published in:

KEY ENGINEERING MATERIALS ; 523/524 ; 46-49

Publication date:

2012-01-01

Size:

4 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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