Planarization of the Gallium Nitride Substrate Grown by the Na Flux Method Applying Catalyst-Referred Etching: Fid-Bau Portal

Planarization of the Gallium Nitride Substrate Grown by the Na Flux Method Applying Catalyst-Referred Etching

Yamaguchi, W. / Sadakuni, S. / Isohashi, A. / Asano, H. / Sano, Y. / Imade, M. / Maruyama, M. / Yoshimura, M. / Mori, Y. / Yamauchi, K.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Planarization of the Gallium Nitride Substrate Grown by the Na Flux Method Applying Catalyst-Referred Etching

Yamaguchi, W. / Sadakuni, S. / Isohashi, A. / Asano, H. / Sano, Y. / Imade, M. / Maruyama, M. / Yoshimura, M. / Mori, Y. / Yamauchi, K.

Planarization of the Gallium Nitride Substrate Grown by the Na Flux Method Applying Catalyst-Referred Etching

Yamaguchi, W. / Sadakuni, S. / Isohashi, A. / Asano, H. / Sano, Y. / Imade, M. / Maruyama, M. / Yoshimura, M. / Mori, Y. / Yamauchi, K.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Planarization of the Gallium Nitride Substrate Grown by the Na Flux Method Applying Catalyst-Referred Etching

Contributors:

Yamaguchi, W. (author) / Sadakuni, S. (author) / Isohashi, A. (author) / Asano, H. (author) / Sano, Y. (author) / Imade, M. (author) / Maruyama, M. (author) / Yoshimura, M. (author) / Mori, Y. (author) / Yamauchi, K. (author)

Published in:

Silicon Carbide and Related Materials 2013 ; 1193-1196

MATERIALS SCIENCE FORUM ; 778/780

Publication date:

2014-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Okamoto, T. / Sano, Y. / Tachibana, K. et al. | British Library Online Contents | 2011

4H-SiC Planarization Using Catalyst-Referred Etching with Pure Water

Isohashi, A. / Sano, Y. / Sadakuni, S. et al. | British Library Online Contents | 2014

Rapid Planarization Method by Ultraviolet Light Irradiation for Gallium Nitride Using Platinum Catalyst

Asano, H. / Sadakuni, S. / Yagi, K. et al. | British Library Online Contents | 2012

Damage-Free Planarization of 4H-SiC (0001) by Catalyst-Referred Etching

Hara, H. / Sano, Y. / Mimura, H. et al. | British Library Online Contents | 2007

Photoenhanced wet chemical etching of MBE grown gallium nitride

Stanton, N.M. / Kent, A.J. / Hawker, P. et al. | British Library Online Contents | 1999