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    High Aspect Ratio Sub-15 nm Silicon Trenches From Block Copolymer Templates

    New search for: Gu, X.
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    New search for: Olynick, D. L.
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    High Aspect Ratio Sub-15 nm Silicon Trenches From Block Copolymer Templates

    New search for: Gu, X.
    New search for: Liu, Z.
    New search for: Gunkel, I.
    New search for: Chourou, S. T.
    New search for: Hong, S. W.
    New search for: Olynick, D. L.
    New search for: Russell, T. P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    High Aspect Ratio Sub-15 nm Silicon Trenches From Block Copolymer Templates

    New search for: Gu, X.
    New search for: Liu, Z.
    New search for: Gunkel, I.
    New search for: Chourou, S. T.
    New search for: Hong, S. W.
    New search for: Olynick, D. L.
    New search for: Russell, T. P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    High Aspect Ratio Sub-15 nm Silicon Trenches From Block Copolymer Templates

    Contributors:

    Gu, X. (author) / Liu, Z. (author) / Gunkel, I. (author) / Chourou, S. T. (author) / Hong, S. W. (author) / Olynick, D. L. (author) / Russell, T. P. (author)

    Published in:

    ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 24 ; 5688-5694

    Publication date:

    2012-01-01

    Size:

    7 pages

    ISSN:

    0935-9648

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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