Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Electrostatic discharge simulation and experimental analysis of electrostatic control in electronic device manufacturing

    New search for: Chakkaew, A.
    New search for: Titiroongruang, W.
    New search for: Yin, J.
    New search for: Zhao, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Electrostatic discharge simulation and experimental analysis of electrostatic control in electronic device manufacturing

    New search for: Chakkaew, A.
    New search for: Titiroongruang, W.
    New search for: Yin, J.
    New search for: Zhao, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Electrostatic discharge simulation and experimental analysis of electrostatic control in electronic device manufacturing

    New search for: Chakkaew, A.
    New search for: Titiroongruang, W.
    New search for: Yin, J.
    New search for: Zhao, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Electrostatic discharge simulation and experimental analysis of electrostatic control in electronic device manufacturing

    Contributors:

    Chakkaew, A. (author) / Titiroongruang, W. (author) / Yin, J. / Zhao, X.

    Published in:

    Special Issue on Advances in Electronic Materials and Microelectromechanical Systems Product ; 160-173

    INTERNATIONAL JOURNAL OF MATERIALS AND PRODUCT TECHNOLOGY ; 44

    Publication date:

    2012-01-01

    Size:

    14 pages

    ISSN:

    0268-1900

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Electrostatic discharge simulation and experimental analysis of electrostatic control in electronic device manufacturing

    Chakkaew, Anusorn / Titiroongruang, Wisut | British Library Online Contents | 2012

    ELECTROSTATIC CHUCK MEMBER, ELECTROSTATIC CHUCK DEVICE, AND MANUFACTURING METHOD FOR ELECTROSTATIC CHUCK MEMBER

    INUI BINSHO / ICHIYOSHI TAKU / OTSUKA TAKASHI | European Patent Office | 2023

    Free access

    Electrostatic chuck component, electrostatic chuck device, and method for manufacturing electrostatic chuck component

    INUI TOSHIYOSHI / ICHIYOSHI TAKU / OTSUKA TAKESHI | European Patent Office | 2024

    Free access

    ELECTROSTATIC CHUCK MEMBER, ELECTROSTATIC CHUCK DEVICE, AND MANUFACTURING METHOD FOR ELECTROSTATIC CHUCK MEMBER

    ICHIYOSHI TAKU / OTSUKA TAKASHI / INUI BINSHO | European Patent Office | 2023

    Free access

    ELECTROSTATIC CHUCK MEMBER, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK MEMBER

    ICHIYOSHI TAKU / INUI SATOYOSHI / OTSUKA TAKESHI | European Patent Office | 2023

    Free access
    Back to top