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Stress Monitoring of Post-processed MEMS Silicon Microbridge Structures Using Raman Spectroscopy
Stress Monitoring of Post-processed MEMS Silicon Microbridge Structures Using Raman Spectroscopy
Stress Monitoring of Post-processed MEMS Silicon Microbridge Structures Using Raman Spectroscopy
Starman, L. (author) / Coutu, R. (author)
EXPERIMENTAL MECHANICS ; 52 ; 1341-1353
2012-01-01
13 pages
Article (Journal)
English
DDC:
620.1
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