Influence of thermal treatment on the formation of ohmic contacts based on Ti/Al/Ni/Au metallization to n-type AlGaN/GaN heterostructures: Fid-Bau Portal

Influence of thermal treatment on the formation of ohmic contacts based on Ti/Al/Ni/Au metallization to n-type AlGaN/GaN heterostructures

Macherzyński, W. / Paszkiewicz, B. / Vincze, A. / Paszkiewicz, R. / Tłaczała, M. / Kováč, J.

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Influence of thermal treatment on the formation of ohmic contacts based on Ti/Al/Ni/Au metallization to n-type AlGaN/GaN heterostructures

Macherzyński, W. / Paszkiewicz, B. / Vincze, A. / Paszkiewicz, R. / Tłaczała, M. / Kováč, J.

Influence of thermal treatment on the formation of ohmic contacts based on Ti/Al/Ni/Au metallization to n-type AlGaN/GaN heterostructures

Macherzyński, W. / Paszkiewicz, B. / Vincze, A. / Paszkiewicz, R. / Tłaczała, M. / Kováč, J.

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Title:

Influence of thermal treatment on the formation of ohmic contacts based on Ti/Al/Ni/Au metallization to n-type AlGaN/GaN heterostructures

Contributors:

Macherzyński, W. (author) / Paszkiewicz, B. (author) / Vincze, A. (author) / Paszkiewicz, R. (author) / Tłaczała, M. (author) / Kováč, J. (author)

Published in:

MATERIALS SCIENCE -WROCLAW- ; 30 ; 342-347

Publication date:

2012-01-01

Size:

6 pages

ISSN:

0137-1339

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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