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    Optical characterization of polysilazane based silica thin films on silicon substrates

    New search for: Ricci, P. C.
    New search for: Gulleri, G.
    New search for: Fumagalli, F.
    New search for: Carbonaro, C. M.
    New search for: Corpino, R.

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    Optical characterization of polysilazane based silica thin films on silicon substrates

    New search for: Ricci, P. C.
    New search for: Gulleri, G.
    New search for: Fumagalli, F.
    New search for: Carbonaro, C. M.
    New search for: Corpino, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Optical characterization of polysilazane based silica thin films on silicon substrates

    New search for: Ricci, P. C.
    New search for: Gulleri, G.
    New search for: Fumagalli, F.
    New search for: Carbonaro, C. M.
    New search for: Corpino, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Optical characterization of polysilazane based silica thin films on silicon substrates

    Contributors:

    Ricci, P. C. (author) / Gulleri, G. (author) / Fumagalli, F. (author) / Carbonaro, C. M. (author) / Corpino, R. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 265 ; 470-474

    Publication date:

    2013-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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