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Polymerization Inhibition by Triplet State Absorption for Nanoscale Lithography
Polymerization Inhibition by Triplet State Absorption for Nanoscale Lithography
Polymerization Inhibition by Triplet State Absorption for Nanoscale Lithography
Harke, B. (author) / Dallari, W. (author) / Grancini, G. (author) / Fazzi, D. (author) / Brandi, F. (author) / Petrozza, A. (author) / Diaspro, A. (author)
ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 25 ; 904-909
2013-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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