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In situ control of SiOx composition by spectroscopic ellipsometry

Gallas, B. / Kao, C. C. / Fisson, S. / Vuye, G. / Rivory, J.

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In situ control of SiOx composition by spectroscopic ellipsometry

Gallas, B. / Kao, C. C. / Fisson, S. / Vuye, G. / Rivory, J.

In situ control of SiOx composition by spectroscopic ellipsometry

Gallas, B. / Kao, C. C. / Fisson, S. / Vuye, G. / Rivory, J.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

In situ control of SiOx composition by spectroscopic ellipsometry

Contributors:

Gallas, B. (author) / Kao, C. C. (author) / Fisson, S. (author) / Vuye, G. (author) / Rivory, J. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 105 ; 204-207

Publication date:

2003-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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