Step-Flow Growth of Fluorescent 4H-SiC Layers on 4 Degree Off-Axis Substrates: Fid-Bau Portal

Step-Flow Growth of Fluorescent 4H-SiC Layers on 4 Degree Off-Axis Substrates

Schimmel, S. / Kaiser, M. / Hens, P. / Jakubavicius, V. / Liljedahl, R. / Sun, J.W. / Yakimova, R. / Ou, Y. / Ou, H.Y. / Linnarsson, M.K.

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Step-Flow Growth of Fluorescent 4H-SiC Layers on 4 Degree Off-Axis Substrates

Schimmel, S. / Kaiser, M. / Hens, P. / Jakubavicius, V. / Liljedahl, R. / Sun, J.W. / Yakimova, R. / Ou, Y. / Ou, H.Y. / Linnarsson, M.K.

Step-Flow Growth of Fluorescent 4H-SiC Layers on 4 Degree Off-Axis Substrates

Schimmel, S. / Kaiser, M. / Hens, P. / Jakubavicius, V. / Liljedahl, R. / Sun, J.W. / Yakimova, R. / Ou, Y. / Ou, H.Y. / Linnarsson, M.K.

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Title:

Step-Flow Growth of Fluorescent 4H-SiC Layers on 4 Degree Off-Axis Substrates

Contributors:

Schimmel, S. (author) / Kaiser, M. (author) / Hens, P. (author) / Jakubavicius, V. (author) / Liljedahl, R. (author) / Sun, J.W. (author) / Yakimova, R. (author) / Ou, Y. (author) / Ou, H.Y. (author) / Linnarsson, M.K. (author)

Published in:

Silicon Carbide and Related Materials 2012 Selected, peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6, 2012, St. Petersburg, Russian Federation ; 185-188

MATERIALS SCIENCE FORUM ; 740/742

Publication date:

2013-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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Epitaxial growth to non-planar substrates by step-flow

Ozdemir, M. | British Library Online Contents | 1999

Growth of Thick 4H-SiC Epitaxial Layers on On-Axis Si-Face Substrates with HCl Addition

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