Si(100) Etching in Alkaline Fluoride Solution: Fid-Bau Portal

Si(100) Etching in Alkaline Fluoride Solution

Chu, Q.-m. / Liu, X. / Zhang, P.-x. / Dai, Y.-n.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Si(100) Etching in Alkaline Fluoride Solution

Chu, Q.-m. / Liu, X. / Zhang, P.-x. / Dai, Y.-n.

Si(100) Etching in Alkaline Fluoride Solution

Chu, Q.-m. / Liu, X. / Zhang, P.-x. / Dai, Y.-n.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Si(100) Etching in Alkaline Fluoride Solution

Contributors:

Chu, Q.-m. (author) / Liu, X. (author) / Zhang, P.-x. (author) / Dai, Y.-n. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -HANGZHOU- ; 30 ; 940-942

Publication date:

2012-01-01

Size:

3 pages

ISSN:

1673-2812

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

Vaughan, A. S. | British Library Online Contents | 1993

Wet chemical etching of ZnO films using NH x -based (NH4)2CO3 and NH4OH alkaline solution

Kim, J. K. / Lee, J. M. | British Library Online Contents | 2017

Fluoride etching of mordenite and its influence on catalytic activity

Kalvachev, Y. / Todorova, T. / Nihtianova, D. et al. | British Library Online Contents | 2017

Synthesis of ammonium silicon fluoride cryptocrystals on silicon by dry etching

Kalem, S. | British Library Online Contents | 2004

Sodium enrichment of an Al-Mg alloy surface after alkaline etching

Feliu, S. / Escudero, E. / Gonzalez, J. A. | British Library Online Contents | 2007