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Subsurface measurement of nanostructures on GaAs by electrostatic force microscopy

Yamada, F. / Kamiya, I.

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Subsurface measurement of nanostructures on GaAs by electrostatic force microscopy

Yamada, F. / Kamiya, I.

Subsurface measurement of nanostructures on GaAs by electrostatic force microscopy

Yamada, F. / Kamiya, I.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Subsurface measurement of nanostructures on GaAs by electrostatic force microscopy

Contributors:

Yamada, F. (author) / Kamiya, I. (author)

Published in:

APPLIED SURFACE SCIENCE ; 271 ; 131-135

Publication date:

2013-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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