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Surface Uniformity of CVD Diamond Film Polishing by Catalytic Polishing Method

Zhou, D.F. / Zheng, X.L. / Ruan, C. / Zhang, L.

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Surface Uniformity of CVD Diamond Film Polishing by Catalytic Polishing Method

Zhou, D.F. / Zheng, X.L. / Ruan, C. / Zhang, L.

Surface Uniformity of CVD Diamond Film Polishing by Catalytic Polishing Method

Zhou, D.F. / Zheng, X.L. / Ruan, C. / Zhang, L.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Surface Uniformity of CVD Diamond Film Polishing by Catalytic Polishing Method

Contributors:

Zhou, D.F. (author) / Zheng, X.L. (author) / Ruan, C. (author) / Zhang, L. (author) / Wang, Y.

Published in:

Digital Design and Manufacturing Technology III ; 102-106

KEY ENGINEERING MATERIALS ; 546

Publication date:

2013-01-01

Size:

5 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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