Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Chemical-Assisted Mechanical Polishing of Diamond Film on Wafer

    New search for: Ho-Cheng, H.
    New search for: Chen, C. C.
    New search for: Jywe, W.
    New search for: Chen, C.-L.
    New search for: Fan, K.-C.
    New search for: Fung, R. F.
    New search for: Hanson, S. G.
    New search for: Hsieh, W.-H.
    New search for: Hsu, C.-L.
    New search for: Huang, Y.-M.
    New search for: Hwang, Y.-L.
    New search for: Jager, G.
    New search for: Jeng, Y. R.
    New search for: Li, W.
    New search for: Liao, Y.-S.
    New search for: Lin, C.-C.
    New search for: Lin, Z.-C.
    New search for: Sung, C.-K.
    New search for: Tzeng, C.-H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Chemical-Assisted Mechanical Polishing of Diamond Film on Wafer

    New search for: Ho-Cheng, H.
    New search for: Chen, C. C.
    New search for: Jywe, W.
    New search for: Chen, C.-L.
    New search for: Fan, K.-C.
    New search for: Fung, R. F.
    New search for: Hanson, S. G.
    New search for: Hsieh, W.-H.
    New search for: Hsu, C.-L.
    New search for: Huang, Y.-M.
    New search for: Hwang, Y.-L.
    New search for: Jager, G.
    New search for: Jeng, Y. R.
    New search for: Li, W.
    New search for: Liao, Y.-S.
    New search for: Lin, C.-C.
    New search for: Lin, Z.-C.
    New search for: Sung, C.-K.
    New search for: Tzeng, C.-H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Chemical-Assisted Mechanical Polishing of Diamond Film on Wafer

    New search for: Ho-Cheng, H.
    New search for: Chen, C. C.
    New search for: Jywe, W.
    New search for: Chen, C.-L.
    New search for: Fan, K.-C.
    New search for: Fung, R. F.
    New search for: Hanson, S. G.
    New search for: Hsieh, W.-H.
    New search for: Hsu, C.-L.
    New search for: Huang, Y.-M.
    New search for: Hwang, Y.-L.
    New search for: Jager, G.
    New search for: Jeng, Y. R.
    New search for: Li, W.
    New search for: Liao, Y.-S.
    New search for: Lin, C.-C.
    New search for: Lin, Z.-C.
    New search for: Sung, C.-K.
    New search for: Tzeng, C.-H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Chemical-Assisted Mechanical Polishing of Diamond Film on Wafer

    Contributors:

    Ho-Cheng, H. (author) / Chen, C. C. (author) / Jywe, W. / Chen, C.-L. / Fan, K.-C. / Fung, R. F. / Hanson, S. G. / Hsieh, W.-H. / Hsu, C.-L. / Huang, Y.-M.

    Published in:

    Progress on Advanced Manufacture for Micro/Nano Technology 2005: PART 2 Proceedings of the 2005 International Conference on Advanced Manufacture Taipei, Taiwan, R.O.C. November 28^t^h - December 2^n^d, 2005 ; 1225-1230

    MATERIALS SCIENCE FORUM ; 505/507

    Publication date:

    2006-01-01

    Size:

    6 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Friction Characteristic of Wafer Surface in Chemical Mechanical Polishing

    Jia, Z. Y. / Su, J. X. / Jin, Z. J. et al. | British Library Online Contents | 2005

    Influence of Polishing Parameters on Chemical Mechanical Polishing Processes of LiTaO~3 Wafer

    Yuan, H. / Wei, X. / Du, H. W. et al. | British Library Online Contents | 2006

    Investigation of Thermo-Chemical Polishing of CVD Diamond Film

    Chou, W. C. / Chao, C. L. / Chien, H. et al. | British Library Online Contents | 2007

    Study on Chemical Mechanical Polishing Mechanism of LiTaO~3 Wafer

    Wei, X. / Yuan, H. / Du, H. W. et al. | British Library Online Contents | 2006

    Diamond tips and nanometer-scale mechanical polishing

    Chang, Z. / Ma, Z. / Shen, J. et al. | British Library Online Contents | 1993

    Back to top