Investigation of micropipe and defects in molten KOH etching of 6H n-silicon carbide (SiC) single crystal: Fid-Bau Portal

Investigation of micropipe and defects in molten KOH etching of 6H n-silicon carbide (SiC) single crystal

Mahajan, S. / Rokade, M. V. / Ali, S. T. / Srinivasa Rao, K. / Munirathnam, N. R. / Prakash, T. L. / Amalnerkar, D. P.

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Investigation of micropipe and defects in molten KOH etching of 6H n-silicon carbide (SiC) single crystal

Mahajan, S. / Rokade, M. V. / Ali, S. T. / Srinivasa Rao, K. / Munirathnam, N. R. / Prakash, T. L. / Amalnerkar, D. P.

Investigation of micropipe and defects in molten KOH etching of 6H n-silicon carbide (SiC) single crystal

Mahajan, S. / Rokade, M. V. / Ali, S. T. / Srinivasa Rao, K. / Munirathnam, N. R. / Prakash, T. L. / Amalnerkar, D. P.

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Title:

Investigation of micropipe and defects in molten KOH etching of 6H n-silicon carbide (SiC) single crystal

Contributors:

Mahajan, S. (author) / Rokade, M. V. (author) / Ali, S. T. (author) / Srinivasa Rao, K. (author) / Munirathnam, N. R. (author) / Prakash, T. L. (author) / Amalnerkar, D. P. (author)

Published in:

MATERIALS LETTERS ; 101 ; 72-75

Publication date:

2013-01-01

Size:

4 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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