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    Modelling and Optimization of DLC Film Thickness Variation for PECVD Processes

    New search for: Li, Z.L.
    New search for: Fu, X.H.
    New search for: Lu, J.
    New search for: Yang, Y.L.
    New search for: Sun, D.G.
    New search for: Fu, Y.

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    Modelling and Optimization of DLC Film Thickness Variation for PECVD Processes

    New search for: Li, Z.L.
    New search for: Fu, X.H.
    New search for: Lu, J.
    New search for: Yang, Y.L.
    New search for: Sun, D.G.
    New search for: Fu, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Modelling and Optimization of DLC Film Thickness Variation for PECVD Processes

    New search for: Li, Z.L.
    New search for: Fu, X.H.
    New search for: Lu, J.
    New search for: Yang, Y.L.
    New search for: Sun, D.G.
    New search for: Fu, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Modelling and Optimization of DLC Film Thickness Variation for PECVD Processes

    Contributors:

    Li, Z.L. (author) / Fu, X.H. (author) / Lu, J. (author) / Yang, Y.L. (author) / Sun, D.G. (author) / Fu, Y.

    Published in:

    Advances in Optics Manufacture ; 214-220

    KEY ENGINEERING MATERIALS ; 552

    Publication date:

    2013-01-01

    Size:

    7 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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