Crystallization Mechanism of Si Film by PECVD: Fid-Bau Portal

Crystallization Mechanism of Si Film by PECVD

Bai, X.-y. / Guo, Q.-c. / Liu, Q. / Pang, H.-j. / Zhang, Y.-q. / Li, H.-b.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Crystallization Mechanism of Si Film by PECVD

Bai, X.-y. / Guo, Q.-c. / Liu, Q. / Pang, H.-j. / Zhang, Y.-q. / Li, H.-b.

Crystallization Mechanism of Si Film by PECVD

Bai, X.-y. / Guo, Q.-c. / Liu, Q. / Pang, H.-j. / Zhang, Y.-q. / Li, H.-b.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Crystallization Mechanism of Si Film by PECVD

Contributors:

Bai, X.-y. (author) / Guo, Q.-c. (author) / Liu, Q. (author) / Pang, H.-j. (author) / Zhang, Y.-q. (author) / Li, H.-b. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -HANGZHOU- ; 31 ; 361-364

Publication date:

2013-01-01

Size:

4 pages

ISSN:

1673-2812

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Said-Bacar, Z. / Prathap, P. / Cayron, C. et al. | British Library Online Contents | 2012

Chemical bonding of magnetron-sputtered copper on PECVD amorphous SiCOF film

Ding, S. J. / Zhang, D. W. / Wang, J. T. et al. | British Library Online Contents | 2003

Modelling and Optimization of DLC Film Thickness Variation for PECVD Processes

Li, Z.L. / Fu, X.H. / Lu, J. et al. | British Library Online Contents | 2013

Hydrogenated diamond-like carbon film deposited on UHMWPE by RF-PECVD

Shi, X. / Wang, Q. / Xu, L. et al. | British Library Online Contents | 2009

Fabrication of Low Stress PECVD-SiNx Film in High Frequency Mode

Shang, Z.G. / Li, D.L. / Wen, Z.Y. | British Library Online Contents | 2013