Fabrication Fluoride High Reflection Mirror by Thermal Evaporation in the ArF Excimer Laser: Fid-Bau Portal

Fabrication Fluoride High Reflection Mirror by Thermal Evaporation in the ArF Excimer Laser

Chang, Y.H. / Jin, C.S. / Li, C. / Jin, J.C.

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Fabrication Fluoride High Reflection Mirror by Thermal Evaporation in the ArF Excimer Laser

Chang, Y.H. / Jin, C.S. / Li, C. / Jin, J.C.

Fabrication Fluoride High Reflection Mirror by Thermal Evaporation in the ArF Excimer Laser

Chang, Y.H. / Jin, C.S. / Li, C. / Jin, J.C.

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Check availability in my library

Order at Subito €

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Document information

Title:

Fabrication Fluoride High Reflection Mirror by Thermal Evaporation in the ArF Excimer Laser

Contributors:

Chang, Y.H. (author) / Jin, C.S. (author) / Li, C. (author) / Jin, J.C. (author) / Fu, Y.

Published in:

Advances in Optics Manufacture ; 252-255

KEY ENGINEERING MATERIALS ; 552

Publication date:

2013-01-01

Size:

4 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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