Room temperature DC magnetron sputtering deposition of hydrogenated aluminum doped zinc oxide thin films on polyethylene terephthalate substrates: Fid-Bau Portal

Room temperature DC magnetron sputtering deposition of hydrogenated aluminum doped zinc oxide thin films on polyethylene terephthalate substrates

Zhu, K. / Yang, Y. / Wei, T. / Tan, R. / Cui, P. / Song, W. / Choy, K. L.

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Room temperature DC magnetron sputtering deposition of hydrogenated aluminum doped zinc oxide thin films on polyethylene terephthalate substrates

Zhu, K. / Yang, Y. / Wei, T. / Tan, R. / Cui, P. / Song, W. / Choy, K. L.

Room temperature DC magnetron sputtering deposition of hydrogenated aluminum doped zinc oxide thin films on polyethylene terephthalate substrates

Zhu, K. / Yang, Y. / Wei, T. / Tan, R. / Cui, P. / Song, W. / Choy, K. L.

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Check availability in my library

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Document information

Title:

Room temperature DC magnetron sputtering deposition of hydrogenated aluminum doped zinc oxide thin films on polyethylene terephthalate substrates

Contributors:

Zhu, K. (author) / Yang, Y. (author) / Wei, T. (author) / Tan, R. (author) / Cui, P. (author) / Song, W. (author) / Choy, K. L. (author)

Published in:

MATERIALS LETTERS ; 106 ; 363-365

Publication date:

2013-01-01

Size:

3 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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