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Room temperature growth of zinc oxide films on Si substrates by the RF magnetron sputtering

Kim, N. H. / Kim, H. W.

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Room temperature growth of zinc oxide films on Si substrates by the RF magnetron sputtering

Kim, N. H. / Kim, H. W.

Room temperature growth of zinc oxide films on Si substrates by the RF magnetron sputtering

Kim, N. H. / Kim, H. W.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Room temperature growth of zinc oxide films on Si substrates by the RF magnetron sputtering

Contributors:

Kim, N. H. (author) / Kim, H. W. (author)

Published in:

MATERIALS LETTERS ; 58 ; 938-943

Publication date:

2004-01-01

Size:

6 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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