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Influence of nitrogen flow rate on growth of TiAlN films prepared by DC magnetron sputtering
Influence of nitrogen flow rate on growth of TiAlN films prepared by DC magnetron sputtering
Influence of nitrogen flow rate on growth of TiAlN films prepared by DC magnetron sputtering
Irudayaraj, A. A. (author) / Kuppusami, P. (author) / Thirumurugesan, R. (author) / Mohandas, E. (author) / Kalainathan, S. (author) / Raghunathan, V. S. (author)
SURFACE ENGINEERING -LONDON- ; 23 ; 7-11
2007-01-01
5 pages
Article (Journal)
English
DDC:
620.44
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