Inductively coupled plasma etching for phase-change material with superlattice-like structure in phase change memory device: Fid-Bau Portal

Inductively coupled plasma etching for phase-change material with superlattice-like structure in phase change memory device

Zhou, J. / Chen, Y. / Zhou, W. / Miao, X. / Yu, N. / Liu, H. / Lan, T. / Yan, J.

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Inductively coupled plasma etching for phase-change material with superlattice-like structure in phase change memory device

Zhou, J. / Chen, Y. / Zhou, W. / Miao, X. / Yu, N. / Liu, H. / Lan, T. / Yan, J.

Inductively coupled plasma etching for phase-change material with superlattice-like structure in phase change memory device

Zhou, J. / Chen, Y. / Zhou, W. / Miao, X. / Yu, N. / Liu, H. / Lan, T. / Yan, J.

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Document information

Title:

Inductively coupled plasma etching for phase-change material with superlattice-like structure in phase change memory device

Contributors:

Zhou, J. (author) / Chen, Y. (author) / Zhou, W. (author) / Miao, X. (author) / Yu, N. (author) / Liu, H. (author) / Lan, T. (author) / Yan, J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 280 ; 862-867

Publication date:

2013-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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