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    Etching of new phase change material Ti"0"."5Sb"2Te"3 by Cl"2/Ar and CF"4/Ar inductively coupled plasmas

    New search for: Zhang, Z.
    New search for: Song, S.
    New search for: Song, Z.
    New search for: Cheng, Y.
    New search for: Zhu, M.
    New search for: Li, X.
    New search for: Zhu, Y.
    New search for: Guo, X.
    New search for: Yin, W.
    New search for: Wu, L.
    New search for: Liu, B.
    New search for: Feng, S.
    New search for: Zhou, D.

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    Etching of new phase change material Ti"0"."5Sb"2Te"3 by Cl"2/Ar and CF"4/Ar inductively coupled plasmas

    New search for: Zhang, Z.
    New search for: Song, S.
    New search for: Song, Z.
    New search for: Cheng, Y.
    New search for: Zhu, M.
    New search for: Li, X.
    New search for: Zhu, Y.
    New search for: Guo, X.
    New search for: Yin, W.
    New search for: Wu, L.
    New search for: Liu, B.
    New search for: Feng, S.
    New search for: Zhou, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Etching of new phase change material Ti"0"."5Sb"2Te"3 by Cl"2/Ar and CF"4/Ar inductively coupled plasmas

    New search for: Zhang, Z.
    New search for: Song, S.
    New search for: Song, Z.
    New search for: Cheng, Y.
    New search for: Zhu, M.
    New search for: Li, X.
    New search for: Zhu, Y.
    New search for: Guo, X.
    New search for: Yin, W.
    New search for: Wu, L.
    New search for: Liu, B.
    New search for: Feng, S.
    New search for: Zhou, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Etching of new phase change material Ti"0"."5Sb"2Te"3 by Cl"2/Ar and CF"4/Ar inductively coupled plasmas

    Contributors:

    Zhang, Z. (author) / Song, S. (author) / Song, Z. (author) / Cheng, Y. (author) / Zhu, M. (author) / Li, X. (author) / Zhu, Y. (author) / Guo, X. (author) / Yin, W. (author) / Wu, L. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 311 ; 68-73

    Publication date:

    2014-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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