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Black germanium produced by inductively coupled plasma etching

Schicho, S. / Jaouad, A. / Sellmer, C. / Morris, D. / Aimez, V. / Ar&#x000E8 / s, R.

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Black germanium produced by inductively coupled plasma etching

Schicho, S. / Jaouad, A. / Sellmer, C. / Morris, D. / Aimez, V. / Ar&#x000E8 / s, R.

Black germanium produced by inductively coupled plasma etching

Schicho, S. / Jaouad, A. / Sellmer, C. / Morris, D. / Aimez, V. / Ar&#x000E8 / s, R.

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Document information

Title:

Black germanium produced by inductively coupled plasma etching

Contributors:

Schicho, S. (author) / Jaouad, A. (author) / Sellmer, C. (author) / Morris, D. (author) / Aimez, V. (author) / Ar&#x000E8 (author) / s, R. (author)

Published in:

MATERIALS LETTERS ; 94 ; 86-88

Publication date:

2013-01-01

Size:

3 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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