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Optimized electrode coverage of membrane actuators based on epitaxial PZT thin films
Optimized electrode coverage of membrane actuators based on epitaxial PZT thin films
Optimized electrode coverage of membrane actuators based on epitaxial PZT thin films
Nguyen, M.D. (author) / Nazeer, H. (author) / Dekkers, M. (author) / Blank, D.H.A. (author) / Rijnders, G. (author)
SMART MATERIALS AND STRUCTURES ; 22 ; 085013
2013-01-01
85013 pages
Article (Journal)
English
DDC:
530
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