A platform for research: civil engineering, architecture and urbanism
Design of 6H-SiC High Temperature Pressure Sensor Chip
Design of 6H-SiC High Temperature Pressure Sensor Chip
Design of 6H-SiC High Temperature Pressure Sensor Chip
Ma, X.M. (author) / Tang, F. (author) / Wang, X.H. (author) / Tang, F.
2013-01-01
6 pages
Article (Journal)
English
DDC:
620.11
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
High temperature piezoresistive @b-SiC-on-SOI pressure sensor with on chip SiC thermistor
British Library Online Contents | 1999
|Micro machining process of high temperature pressure sensor gauge chip based on SIMOX SOI wafer
British Library Online Contents | 2008
|Micro machining process of high temperature pressure sensor gauge chip based on SIMOX SOI wafer
British Library Online Contents | 2008
|Sealing method of ceramic capacitive pressure sensor chip
European Patent Office | 2020
|Automated High-Temperature Pressure Sensor Verification and Characterization
BASE | 2023
|