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The Effect of Casimir Force to the Performance of the Micro-Accelerometer

Shen, L. / Gao, S.Q. / Guan, Y.W.

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The Effect of Casimir Force to the Performance of the Micro-Accelerometer

Shen, L. / Gao, S.Q. / Guan, Y.W.

The Effect of Casimir Force to the Performance of the Micro-Accelerometer

Shen, L. / Gao, S.Q. / Guan, Y.W.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

The Effect of Casimir Force to the Performance of the Micro-Accelerometer

Contributors:

Shen, L. (author) / Gao, S.Q. (author) / Guan, Y.W. (author) / Tang, F.

Published in:

Micro-Nano Technology XIV ; 247-250

KEY ENGINEERING MATERIALS ; 562/565

Publication date:

2013-01-01

Size:

4 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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