Modeling of Nonlinear Stiffness of Micro-Resonator in Silicon Resonant Accelerometer: Fid-Bau Portal

Modeling of Nonlinear Stiffness of Micro-Resonator in Silicon Resonant Accelerometer

Jing, Z. / Jiang, S.D. / Qiu, A.P.

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Modeling of Nonlinear Stiffness of Micro-Resonator in Silicon Resonant Accelerometer

Jing, Z. / Jiang, S.D. / Qiu, A.P.

Modeling of Nonlinear Stiffness of Micro-Resonator in Silicon Resonant Accelerometer

Jing, Z. / Jiang, S.D. / Qiu, A.P.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Modeling of Nonlinear Stiffness of Micro-Resonator in Silicon Resonant Accelerometer

Contributors:

Jing, Z. (author) / Jiang, S.D. (author) / Qiu, A.P. (author) / Tang, F.

Published in:

Micro-Nano Technology XIV ; 374-379

KEY ENGINEERING MATERIALS ; 562/565

Publication date:

2013-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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