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A New Method to Analyze the Stiffness of MEMS Accelerometer

Liu, H.T. / Wen, Z.Y. / Shang, Z.G. / Chen, L.

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A New Method to Analyze the Stiffness of MEMS Accelerometer

Liu, H.T. / Wen, Z.Y. / Shang, Z.G. / Chen, L.

A New Method to Analyze the Stiffness of MEMS Accelerometer

Liu, H.T. / Wen, Z.Y. / Shang, Z.G. / Chen, L.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

A New Method to Analyze the Stiffness of MEMS Accelerometer

Contributors:

Liu, H.T. (author) / Wen, Z.Y. (author) / Shang, Z.G. (author) / Chen, L. (author)

Published in:

KEY ENGINEERING MATERIALS ; 609/610 ; 710-714

Publication date:

2014-01-01

Size:

5 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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