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Design and Fabrication of a Lateral Contact RF-MEMS Switch for MM-Wave Applications

Zhu, Y.Q. / Han, L. / Tang, J.Y. / Huang, Q.G.

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Design and Fabrication of a Lateral Contact RF-MEMS Switch for MM-Wave Applications

Zhu, Y.Q. / Han, L. / Tang, J.Y. / Huang, Q.G.

Design and Fabrication of a Lateral Contact RF-MEMS Switch for MM-Wave Applications

Zhu, Y.Q. / Han, L. / Tang, J.Y. / Huang, Q.G.

Access

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Check availability in my library

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Document information

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Document information

Title:

Design and Fabrication of a Lateral Contact RF-MEMS Switch for MM-Wave Applications

Contributors:

Zhu, Y.Q. (author) / Han, L. (author) / Tang, J.Y. (author) / Huang, Q.G. (author) / Tang, F.

Published in:

Micro-Nano Technology XIV ; 645-651

KEY ENGINEERING MATERIALS ; 562/565

Publication date:

2013-01-01

Size:

7 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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