A Novel Method to Modify the Lapping Uniformity for Silicon Wafer: Fid-Bau Portal

A Novel Method to Modify the Lapping Uniformity for Silicon Wafer

Zuo, W.J. / Du, X.H. / Zhang, H.E. / Su, Y.Z. / Lei, T.P. / Wang, L.Y. / Sun, D.H.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

A Novel Method to Modify the Lapping Uniformity for Silicon Wafer

Zuo, W.J. / Du, X.H. / Zhang, H.E. / Su, Y.Z. / Lei, T.P. / Wang, L.Y. / Sun, D.H.

A Novel Method to Modify the Lapping Uniformity for Silicon Wafer

Zuo, W.J. / Du, X.H. / Zhang, H.E. / Su, Y.Z. / Lei, T.P. / Wang, L.Y. / Sun, D.H.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

A Novel Method to Modify the Lapping Uniformity for Silicon Wafer

Contributors:

Zuo, W.J. (author) / Du, X.H. (author) / Zhang, H.E. (author) / Su, Y.Z. (author) / Lei, T.P. (author) / Wang, L.Y. (author) / Sun, D.H. (author) / Tang, F.

Published in:

Micro-Nano Technology XIV ; 790-795

KEY ENGINEERING MATERIALS ; 562/565

Publication date:

2013-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Ozturk, Savas / Aydin, Levent / Kucukdogan, Nilay et al. | British Library Online Contents | 2018

On the Evaluation of Lapping Uniformity for Precision Balls

Wang, Z.W. / Lv, B.H. / Yuan, J.L. et al. | British Library Online Contents | 2009

Research and Simulation on the Wear Uniformity of Lapping Plate

Yuan, J.L. / Liu, W.T. / Wang, Z.W. et al. | British Library Online Contents | 2008

The Experimental Study on Lapping and Polishing of Metal Micro-Coil Based on Silicon Wafer

Liu, B. D. / Guan, J. L. / Li, D. S. et al. | British Library Online Contents | 2006

High Speed Lapping Ellipsoid by Means of a Lapping Tool Bending Method

Yang, J. D. / Liu, Q. / Tian, C. L. et al. | British Library Online Contents | 2007