A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
The Experimental Study on Lapping and Polishing of Metal Micro-Coil Based on Silicon Wafer
The Experimental Study on Lapping and Polishing of Metal Micro-Coil Based on Silicon Wafer
The Experimental Study on Lapping and Polishing of Metal Micro-Coil Based on Silicon Wafer
Liu, B. D. (author) / Guan, J. L. (author) / Li, D. S. (author) / Li, H. Q. (author)
KEY ENGINEERING MATERIALS ; 304/305 ; 422-425
2006-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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