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    System-Level Simulation and Fabrication of On-Chip Fatigue Bending Test Structure for Micro-Scale Polysilicon Films

    New search for: Guan, L.
    New search for: Gao, J.L.
    New search for: Liu, Q.
    New search for: Li, B.
    New search for: Chu, J.K.
    New search for: Tang, F.

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    System-Level Simulation and Fabrication of On-Chip Fatigue Bending Test Structure for Micro-Scale Polysilicon Films

    New search for: Guan, L.
    New search for: Gao, J.L.
    New search for: Liu, Q.
    New search for: Li, B.
    New search for: Chu, J.K.
    New search for: Tang, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    System-Level Simulation and Fabrication of On-Chip Fatigue Bending Test Structure for Micro-Scale Polysilicon Films

    New search for: Guan, L.
    New search for: Gao, J.L.
    New search for: Liu, Q.
    New search for: Li, B.
    New search for: Chu, J.K.
    New search for: Tang, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    System-Level Simulation and Fabrication of On-Chip Fatigue Bending Test Structure for Micro-Scale Polysilicon Films

    Contributors:

    Guan, L. (author) / Gao, J.L. (author) / Liu, Q. (author) / Li, B. (author) / Chu, J.K. (author) / Tang, F.

    Published in:

    Micro-Nano Technology XIV ; 930-934

    KEY ENGINEERING MATERIALS ; 562/565

    Publication date:

    2013-01-01

    Size:

    5 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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