A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
MEMS Monolithic Integration Technology
MEMS Monolithic Integration Technology
MEMS Monolithic Integration Technology
Zhang, Z.Y. (author) / Shi, Z.G. (author) / Yang, Z.C. (author) / Peng, B. (author) / Tang, F.
2013-01-01
6 pages
Article (Journal)
English
DDC:
620.11
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
A Monolithic MEMS Accelerometer Process
| British Library Online Contents | 2011
Materials & Process Integration for MEMS
| TIBKAT | 2002
Materials & Process Integration for MEMS
| UB Braunschweig | 2002
Semiconductor alloys for monolithic integration with Si microelectronics
| British Library Online Contents | 1999
Monolithic Integration of Multi Color Organic LEDs by Grayscale Lithography
British Library Online Contents | 2010