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Influence of the Germanium content on the amorphization of silicon-germanium alloys during ion implantation

Belafhaili, A. / Laanab, L. / Cristiano, F. / Cherkashin, N. / Claverie, A.

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Influence of the Germanium content on the amorphization of silicon-germanium alloys during ion implantation

Belafhaili, A. / Laanab, L. / Cristiano, F. / Cherkashin, N. / Claverie, A.

Influence of the Germanium content on the amorphization of silicon-germanium alloys during ion implantation

Belafhaili, A. / Laanab, L. / Cristiano, F. / Cherkashin, N. / Claverie, A.

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Check availability in my library

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Document information

Title:

Influence of the Germanium content on the amorphization of silicon-germanium alloys during ion implantation

Contributors:

Belafhaili, A. (author) / Laanab, L. (author) / Cristiano, F. (author) / Cherkashin, N. (author) / Claverie, A. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 16 ; 1655-1658

Publication date:

2013-01-01

Size:

4 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

Koffel, S. / Claverie, A. / BenAssayag, G. et al. | British Library Online Contents | 2006

Amorphization of silicon by high dose germanium ion implantation with no external cooling mechanism

Xia, Z. / Saarilahti, J. / Ristolainen, E. et al. | British Library Online Contents | 1994

Ion implantation and electron irradiation damage in unstrained germanium and silicon-germanium alloys

Peaker, A. R. / Markevich, V. P. / Murin, L. I. et al. | British Library Online Contents | 2005

Bandgap engineering of amorphous silicon-germanium alloys

Conde, Joao Pedro Rodrigues | TIBKAT | 1990

Amorphization of silicon and germanium by mechanical grinding: effect of atmosphere and milling conditions

Millet, P. / Calka, A. | British Library Online Contents | 1994