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Influence of the Germanium content on the amorphization of silicon-germanium alloys during ion implantation
Influence of the Germanium content on the amorphization of silicon-germanium alloys during ion implantation
Influence of the Germanium content on the amorphization of silicon-germanium alloys during ion implantation
Belafhaili, A. (author) / Laanab, L. (author) / Cristiano, F. (author) / Cherkashin, N. (author) / Claverie, A. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 16 ; 1655-1658
2013-01-01
4 pages
Article (Journal)
English
DDC:
621.38152
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