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    Temperature dependence of electrical properties for MOS capacitor with HfO"2/SiO"2 gate dielectric stack

    New search for: Yu, T.
    New search for: Jin, C. G.
    New search for: Dong, Y. J.
    New search for: Cao, D.
    New search for: Zhuge, L. J.
    New search for: Wu, X. M.
    New search for: Cheong, K. Y.
    New search for: Paskaleva, A.

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    Temperature dependence of electrical properties for MOS capacitor with HfO"2/SiO"2 gate dielectric stack

    New search for: Yu, T.
    New search for: Jin, C. G.
    New search for: Dong, Y. J.
    New search for: Cao, D.
    New search for: Zhuge, L. J.
    New search for: Wu, X. M.
    New search for: Cheong, K. Y.
    New search for: Paskaleva, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Temperature dependence of electrical properties for MOS capacitor with HfO"2/SiO"2 gate dielectric stack

    New search for: Yu, T.
    New search for: Jin, C. G.
    New search for: Dong, Y. J.
    New search for: Cao, D.
    New search for: Zhuge, L. J.
    New search for: Wu, X. M.
    New search for: Cheong, K. Y.
    New search for: Paskaleva, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Temperature dependence of electrical properties for MOS capacitor with HfO"2/SiO"2 gate dielectric stack

    Contributors:

    Yu, T. (author) / Jin, C. G. (author) / Dong, Y. J. (author) / Cao, D. (author) / Zhuge, L. J. (author) / Wu, X. M. (author) / Cheong, K. Y. / Paskaleva, A.

    Published in:

    Advanced Oxides for Electronics ; 1321-1327

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 16

    Publication date:

    2013-01-01

    Size:

    7 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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