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Chemical and structural properties of polymorphous silicon thin films grown from dichlorosilane

Alvarez-Macias, C. / Monroy, B. M. / Huerta, L. / Canseco-Martinez, M. A. / Picquart, M. / Santoyo-Salazar, J. / Sanchez, M. F. G. / Santana, G.

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Chemical and structural properties of polymorphous silicon thin films grown from dichlorosilane

Alvarez-Macias, C. / Monroy, B. M. / Huerta, L. / Canseco-Martinez, M. A. / Picquart, M. / Santoyo-Salazar, J. / Sanchez, M. F. G. / Santana, G.

Chemical and structural properties of polymorphous silicon thin films grown from dichlorosilane

Alvarez-Macias, C. / Monroy, B. M. / Huerta, L. / Canseco-Martinez, M. A. / Picquart, M. / Santoyo-Salazar, J. / Sanchez, M. F. G. / Santana, G.

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Document information

Title:

Chemical and structural properties of polymorphous silicon thin films grown from dichlorosilane

Contributors:

Alvarez-Macias, C. (author) / Monroy, B. M. (author) / Huerta, L. (author) / Canseco-Martinez, M. A. (author) / Picquart, M. (author) / Santoyo-Salazar, J. (author) / Sanchez, M. F. G. (author) / Santana, G. (author)

Published in:

APPLIED SURFACE SCIENCE ; 285 ; 431-439

Publication date:

2013-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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