Effect of deposition temperature on polymorphous silicon thin films by PECVD: Role of hydrogen: Fid-Bau Portal

Effect of deposition temperature on polymorphous silicon thin films by PECVD: Role of hydrogen

Hamui, L. / Monroy, B.M. / Kim, K.H. / López-Suárez, A. / Santoyo-Salazar, J. / López-López, M. / Roca i Cabarrocas, P. / Santana, G.

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Effect of deposition temperature on polymorphous silicon thin films by PECVD: Role of hydrogen

Hamui, L. / Monroy, B.M. / Kim, K.H. / López-Suárez, A. / Santoyo-Salazar, J. / López-López, M. / Roca i Cabarrocas, P. / Santana, G.

Effect of deposition temperature on polymorphous silicon thin films by PECVD: Role of hydrogen

Hamui, L. / Monroy, B.M. / Kim, K.H. / López-Suárez, A. / Santoyo-Salazar, J. / López-López, M. / Roca i Cabarrocas, P. / Santana, G.

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Title:

Effect of deposition temperature on polymorphous silicon thin films by PECVD: Role of hydrogen

Contributors:

Hamui, L. (author) / Monroy, B.M. (author) / Kim, K.H. (author) / López-Suárez, A. (author) / Santoyo-Salazar, J. (author) / López-López, M. (author) / Roca i Cabarrocas, P. (author) / Santana, G. (author)

Published in:

Materials science in semiconductor processing ; 41 ; 390-397

Publication date:

2016-01-01

Size:

8 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

Hamui, L. / Monroy, B.M. / Kim, K.H. et al. | British Library Online Contents | 2016

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Martins, R. / Aguas, H. / Ferreira, I. et al. | British Library Online Contents | 2004

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MIS Photodiodes of Polymorphous Silicon Deposited at Higher Growth Rates by 27.12 MHz PECVD Discharge

Aguas, H. / Pereira, L. / Raniero, L. et al. | British Library Online Contents | 2004