Study of Surface Morphologies of On-Axis 6H-SiC Wafer after High-Temperature Etching and Epitaxial Growth: Fid-Bau Portal

Study of Surface Morphologies of On-Axis 6H-SiC Wafer after High-Temperature Etching and Epitaxial Growth

Liu, X.C. / Shi, B. / Xin, J. / Huang, W. / Liu, X. / Zheng, Y.Q. / Shi, E.W.

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Study of Surface Morphologies of On-Axis 6H-SiC Wafer after High-Temperature Etching and Epitaxial Growth

Liu, X.C. / Shi, B. / Xin, J. / Huang, W. / Liu, X. / Zheng, Y.Q. / Shi, E.W.

Study of Surface Morphologies of On-Axis 6H-SiC Wafer after High-Temperature Etching and Epitaxial Growth

Liu, X.C. / Shi, B. / Xin, J. / Huang, W. / Liu, X. / Zheng, Y.Q. / Shi, E.W.

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Title:

Study of Surface Morphologies of On-Axis 6H-SiC Wafer after High-Temperature Etching and Epitaxial Growth

Contributors:

Liu, X.C. (author) / Shi, B. (author) / Xin, J. (author) / Huang, W. (author) / Liu, X. (author) / Zheng, Y.Q. (author) / Shi, E.W. (author) / Okumura, H. / Harima, H. / Kimoto, T.

Published in:

Silicon Carbide and Related Materials 2013 PART 1 Selected, peer reviewed papers from the 15^t^h International Conference on Silicon Carbide and Related Materials, (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan ; 197-200

MATERIALS SCIENCE FORUM ; 778/780

Publication date:

2014-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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