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    Reliability Improvement and Optimization of Trench Orientation of 4H-SiC Trench-Gate Oxide

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    Reliability Improvement and Optimization of Trench Orientation of 4H-SiC Trench-Gate Oxide

    New search for: Kojima, T.
    New search for: Harada, S.
    New search for: Ariyoshi, K.
    New search for: Senzaki, J.
    New search for: Takei, M.
    New search for: Yonezawa, Y.
    New search for: Tanaka, Y.
    New search for: Okumura, H.
    New search for: Okumura, H.
    New search for: Harima, H.
    New search for: Kimoto, T.
    New search for: Yoshimoto, M.
    New search for: Watanabe, H.
    New search for: Hatayama, T.
    New search for: Matsuura, H.
    New search for: Funaki, T.
    New search for: Sano, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Reliability Improvement and Optimization of Trench Orientation of 4H-SiC Trench-Gate Oxide

    New search for: Kojima, T.
    New search for: Harada, S.
    New search for: Ariyoshi, K.
    New search for: Senzaki, J.
    New search for: Takei, M.
    New search for: Yonezawa, Y.
    New search for: Tanaka, Y.
    New search for: Okumura, H.
    New search for: Okumura, H.
    New search for: Harima, H.
    New search for: Kimoto, T.
    New search for: Yoshimoto, M.
    New search for: Watanabe, H.
    New search for: Hatayama, T.
    New search for: Matsuura, H.
    New search for: Funaki, T.
    New search for: Sano, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
    Title:

    Reliability Improvement and Optimization of Trench Orientation of 4H-SiC Trench-Gate Oxide

    Contributors:

    Kojima, T. (author) / Harada, S. (author) / Ariyoshi, K. (author) / Senzaki, J. (author) / Takei, M. (author) / Yonezawa, Y. (author) / Tanaka, Y. (author) / Okumura, H. (author) / Okumura, H. / Harima, H.

    Published in:

    Silicon Carbide and Related Materials 2013 PART 1 Selected, peer reviewed papers from the 15^t^h International Conference on Silicon Carbide and Related Materials, (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan ; 537-540

    MATERIALS SCIENCE FORUM ; 778/780

    Publication date:

    2014-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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