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    Fabrication of 25-nm-Pitched CoPt Magnetic Dot Arrays Using 30-keV-Electron Beam Drawing, RIE and Ion-Milling

    New search for: Mohamad, Z.b.
    New search for: Huda, M.
    New search for: Komori, T.
    New search for: Alip, R.I.
    New search for: Zhang, H.
    New search for: Yin, Y.
    New search for: Hosaka, S.
    New search for: Hosaka, S.

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    Fabrication of 25-nm-Pitched CoPt Magnetic Dot Arrays Using 30-keV-Electron Beam Drawing, RIE and Ion-Milling

    New search for: Mohamad, Z.b.
    New search for: Huda, M.
    New search for: Komori, T.
    New search for: Alip, R.I.
    New search for: Zhang, H.
    New search for: Yin, Y.
    New search for: Hosaka, S.
    New search for: Hosaka, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Fabrication of 25-nm-Pitched CoPt Magnetic Dot Arrays Using 30-keV-Electron Beam Drawing, RIE and Ion-Milling

    New search for: Mohamad, Z.b.
    New search for: Huda, M.
    New search for: Komori, T.
    New search for: Alip, R.I.
    New search for: Zhang, H.
    New search for: Yin, Y.
    New search for: Hosaka, S.
    New search for: Hosaka, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
    Title:

    Fabrication of 25-nm-Pitched CoPt Magnetic Dot Arrays Using 30-keV-Electron Beam Drawing, RIE and Ion-Milling

    Contributors:

    Mohamad, Z.b. (author) / Huda, M. (author) / Komori, T. (author) / Alip, R.I. (author) / Zhang, H. (author) / Yin, Y. (author) / Hosaka, S. (author) / Hosaka, S.

    Published in:

    Advanced Micro-Device Engineering IV ; 92-96

    KEY ENGINEERING MATERIALS ; 596

    Publication date:

    2014-01-01

    Size:

    5 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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