Cross-sectional study of high spatial frequency ripples performed on silicon using nanojoule femtosecond laser pulses at high repetition rate: Fid-Bau Portal

Cross-sectional study of high spatial frequency ripples performed on silicon using nanojoule femtosecond laser pulses at high repetition rate

Le Harzic, R. / Menzel, M. / Henning, S. / Heilmann, A. / Stracke, F. / Zimmermann, H.

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Cross-sectional study of high spatial frequency ripples performed on silicon using nanojoule femtosecond laser pulses at high repetition rate

Le Harzic, R. / Menzel, M. / Henning, S. / Heilmann, A. / Stracke, F. / Zimmermann, H.

Cross-sectional study of high spatial frequency ripples performed on silicon using nanojoule femtosecond laser pulses at high repetition rate

Le Harzic, R. / Menzel, M. / Henning, S. / Heilmann, A. / Stracke, F. / Zimmermann, H.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Cross-sectional study of high spatial frequency ripples performed on silicon using nanojoule femtosecond laser pulses at high repetition rate

Contributors:

Le Harzic, R. (author) / Menzel, M. (author) / Henning, S. (author) / Heilmann, A. (author) / Stracke, F. (author) / Zimmermann, H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 305 ; 670-673

Publication date:

2014-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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